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Model 6520
Programmable Digital Teraohmmeter
Ultra-High Resistance High Accuracy Measurement
G uildline 6520 Digital Teraohmmeter is the latest instrument of its
type from Guildline Instruments. It expands the range and
performance of the earlier models to a level never available before in
a high resistance measuring instrument. The 6520 teraohmmeter
offers true state-of-the-art ultra-high resistance measurement
superior to bridge techniques. Through its inherently linear design of
the measurement section, the 6520 achieves the highest accuracy and
range commercially available today. Accuracies better than 0.0025%
can be achieved when used as a transfer standard.
The 6520 teraohmmeter is fully automatic, functioning under
microprocessor control and Guildline's unique SofcalTM on-board
calibration firmware. The instrument measures extremely high
resistances, up to 1017 ohms, or very small currents down to 10-14
amps. Measurement time for the instrument is 5ms to 1000 seconds
and sensing of instrument resistance range, integration time and
threshold voltage is fully automatic.
The 6520 utilizes SofcalTM to configure the IEEE-488.2 and the
RS232C interfaces. In addition, SofcalTM provides supply and
reference voltage diagnostics, protection resistor compensation,
integrator linearity check and standard calibration from the front
6520 Features panel. The calibration is simply achieved by connecting a known
reference resistor to the input connectors (accessory 9336-100M) and
starting the self calibration procedure. The on-board firmware also
> Resistance Mode: range 100 kilohms to provides self test and diagnostic help features.
100,000 teraohms
> Current Mode: range 10-2 amps to 10 -14
The 6520 achieves the highest accuracy and
amps range commercially available.
> Automatic sensing of resistance range, Production line testing, calibration of electrometers, semiconductor
integration time and threshold voltage testing, capacitance leakage measurement, film surface and volume
resistivity measurement, and other applications (performed in the
> Surface and volume resistivity past by previous teraohmmeters) can all be applied to automatic
measurements with 65221 test fixture testing by the 6520. In the current mode, the instrument can be used
to measure chemical reaction rates, photo-electric effects and
> Test voltages 1 to 1000 volts
ionization effects.
> Environmental monitoring with 65220 The SCPI compliant IEEE-488.2 and RS 232C interfaces are built-in as
sensors standard, as is an external trigger input to command a measurement
from an external device, process or timing mechanism.
> Logging, graphical display and analysis of
measurements The 6520 can be remotely controlled through the IEEE-488.2 by
Guildline's PC installed TeraCalTM software. TeraCalTM is a convenient
> Fully programmable Windows® -based software program, developed on the National
> Programmable test profiles Instruments LabVIEWTM platform, that is developed specifically for
metrologists. It provides easy to use controls, data storage , report
> SofcalTM for on-board intelligence and generation and utilities for the performance of a variety of resistance
front panel calibration measurements. When used with the 65221 test fixture, this includes
surface and volume resistivity. When the optional 65220
> TeraCalTM Data Acquisition Software environmental sensors are installed, the ambient temperature,
humidity and pressure can be recorded.
> SCPI compliant IEEE-488. 2 and RS232C
built-in as standard A range of calibrating resistors are available (9336, 9337), as well as
other accessories for use with the 6520.
> Rear input option
CompuMess Elektronik GmbH · Lise-Meitner-Str.1 · 85716 Unterschleissheim
Tel 089-321501-0 · Fax 089-321501-11 · www.compumess.de · www.netzteile.de
6520 Programmable Digital Teraohmmeter
6520 Specifications
Accuracy
Range Uncertainty Transfer Temperature Range Uncertainty Temperature
(Ohms) (±% of reading Uncertainty Coefficient (A) (±% of reading Coefficient
over 1 year, (±% of reading (±% of reading/°C over 1 year, (±% of reading/°C
23°C±2°C) over 4 hours, 15°C to 21°C, 23°C±2°C) 15°C to 21°C
* 23°C±2°C)** 25°C to 30°C) 25°C to 30°C)
105 R 106 0.025 0.005 0.01 10 -3 I 10 -2 0.1 0.008
106 < R 107 0.025 0.0025 0.0035 10 -4 I <10 -3 0.1 0.008
107 < R 108 0.015 0.0025 0.0035 10 -5 I <10 -4 0.1 0.005
108 < R 109 0.02 0.0025 0.005 10 -6 I <10 -5 0.1 0.005
109 < R 1010 0.06 0.0025 0.007 10 -7 I <10 -6 0.1 0.005
1010 < R 10 11 0.08 0.0025 0.01 10 -8 I <10 -7 0.2 0.03
1011 < R 1012 0.1 0.005 0.02 10 -9 I <10 -8 0.2 0.03
1012 < R 10 13 0.2 0.0075 0.03 10 -10 I <10 -9 0.2 0.1
1013 < R 10 14 0.3 0.0125 0.05 10 -11 I < 10 -10 1.0 0.1
1014 < R 10 15 1.0 0.05 0.1 10 -12 I < 10 -11 1.0 0.1
1015 < R 10 16 5.0 0.1 1.0 10 -13 I < 10 -12 10.0 1
1016 < R 10 17 50.0 0.2 5.0 10 -14 I < 10 -13 50.0 5
* 6520 operating in Auto mode to 1T ohms and with a soak time of 5 seconds or more above 1T ohms
Does not include instabilities of the test resistance (e.g. dielectric effects, voltage coefficients)
**This is the stability of the measurements of the 6520 over the specified time period.
Range: 105 to 1017 ohms or 10-2 to 10-14 amps Interfaces: IEEE-488.2 and RS232
Display Resolution: selectable (default 6 digits)
Input Impedance: 100 k ohms Power Supply: 100, 120, 220, 240 VAC
100 ohms (current mode) 50/60 Hz±5%, 50 VA
Measurement time: 5ms to > 1000 seconds Environment: Operating: 15oC to 30 oC
Test Voltage: 1, 2, 5, 10, 20, 50, 100, 200, 500 & 20% to 50% RH
1000 Volts (Programmable) Storage: -30oC to 70oC
Environmental Monitor: 15% to 80% RH
Temperature: Range: -50 oC to 100 oC non-condensing
Uncertainty: ±0.3% (+ sensor error) Source connector: High Voltage BNC
over 1 year Input Connector: 3 lug triax
Atmospheric Pressure: Range: 15 to 115 kPa
Uncertainty: ±0.3% (+ sensor error) Exterior Dimensions: H 89mm (3.5in)
over 1 year add 11 mm (0.4in) to height for bench top feet
Humidity: Range: 0% to 100% RH W 444mm (17.5in)
Uncertainty: ±0.3% (+ sensor error) D 500mm (19.7in)
over 1 year Weight: 11.4 kg (25 lbs)
National Instruments and LabVIEW are trademarks of National Instruments Corporation. Windows is a registered trademark of Microsoft Corporation.
6520 Ordering Information
6520 Programmable Digital Teraohmmeter Guildline is distributed by:
TeraCalTM Data Acquisition software (included)
TM6520 Technical Manual (included)
Certificate of Calibration (included)
Report of Calibration (extra charge)
Accessories: CompuMess Elektronik GmbH
65220 Environmental Monitor Lise-Meitner-Str.1, 85716 Unterschleissheim
65221 Surface/Volume Resistivity Test Fixture
65222 Adapter for Penn Airborne Resistor Tel 089-321501-0 Fax 089-321501-11
65223 Shielded Sample Enclosure http://www.compumess.de oder http://www.netzteile.de
65224 Zero link
65225 Lead Set
65226 Calibration Kit
65228 Adapter for Triaxial Connector on Keithley Resistor
9336-100M Standard Resistor
9336-x Standard Resistor (range 10M to 100G )
9337-x Standard Resistor (range 1T to 1P ) Guildline Instruments Limited
6675A-01A National Instruments IEEE-488.2 Interface Card for PC P.O. Box 99
PCI slot 21 Gilroy Street
6675A-01B National Instruments IEEE-488.2 Interface Card for PC
ISA Slot Smiths Falls, Ontario Canada K7A 4S9
6675A-02A 2 Meters Double Shielded IEEE-488.2 Interface Cable Phone: (613) 283-3000
6675A-02B 1 Meter Double Shielded IEEE-488.2 Interface Cable FAX: (613) 283-6082
6520 V1.4 Copyright © 2003.07.03 Guildline Instruments Limited. All rights reserved. Subject to change without notice .
Web: www.guildline.ca